Measurement of Silane Concentration in Silane-Hydrogen Gas Mixtures Using a Quartz Friction Pressure Gauge at Low Pressures and Low Silane Concentrations
نویسندگان
چکیده
منابع مشابه
Novel pressure-induced interactions in silane-hydrogen.
We report novel molecular compound formation from silane-hydrogen mixtures with intermolecular interactions unprecedented for hydrogen-rich solids. A complex H_{2} vibron spectrum with anticorrelated pressure-frequency dependencies and a striking H-D exchange below 10 GPa reveal strong and unusual attractive interactions between SiH_{4} and H_{2} and molecular bond destabilization at remarkably...
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Polycrystalline GexSi1-x can be grown from a mixture of SiH4 and GeH4 as reactive gases in a conventional LPCVD system. Several major problems make the growth of polycrystalline GexSi1-x more difficult with respect to poly-Si growth. Firstly, the initial formation of the GexSi1-x nuclei on the SiO2 surface is retarded. The incubation time, depending on deposition conditions, varies from a few s...
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ژورنال
عنوان ژورنال: Journal of the Vacuum Society of Japan
سال: 2015
ISSN: 1882-2398,1882-4749
DOI: 10.3131/jvsj2.58.181